Sputtering Condition Optimization of Sputtered IrOx and TiN Stimulus Electrodes for Retinal Prosthesis

Publication Information

Title

Japanese:
English:	Sputtering Condition Optimization of Sputtered IrOx and TiN Stimulus Electrodes for Retinal Prosthesis

Author

Japanese:	Yi-Li Pan, 野田俊彦, 笹川清隆, 德田崇, 太田淳.
English:	Yi-Li Pan, T. Noda, K. Sasagawa, T. Tokuda, J. Ohta.

Language

English

Journal/Book name

Japanese:
English:	IEEJ Transaction on Electrical and Electronic Engineering

Volume, Number, Page

Vol. 8 pp. 310-312

Published date

2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: