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Publication Information
Title
Japanese:
English:
Crystallization behavior and ferroelectric property of HfO2–ZrO2 films fabricated by chemical solution deposition
Author
Japanese:
Shuhei Nakayama,
舟窪 浩
,
内田 寛
.
English:
Shuhei Nakayama,
Hiroshi Funakubo
,
Hiroshi Uchida
.
Language
English
Journal/Book name
Japanese:
English:
Jpn. J. Appl. Phys.
Volume, Number, Page
Vol. 57 pp. 11UF06-1-5
Published date
Sept. 2018
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.7567/JJAP.57.11UF06
©2007
Institute of Science Tokyo All rights reserved.