A MEMS Accelerometer for Sub-mG Sensing

Publication Information

Title

Japanese:
English:	A MEMS Accelerometer for Sub-mG Sensing

Author

Japanese:	山根大輔, 小西敏文, 佐布晃昭, 年吉洋, 曽根正人, 町田克之, 伊藤浩之, 益一哉.
English:	Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	Sensors and Materials

Volume, Number, Page

Vol. 31 no. 9 pp. 2883-2894

Published date

July 23, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI