Development of low reflectivity and high resolution negative-tone photoresist

Publication Information

Title

Japanese:
English:	Development of low reflectivity and high resolution negative-tone photoresist

Author

Japanese:	Shiota, D., Tadokoro, Y., Noda, K., Shida, M., 藤井正明.
English:	Shiota, D., Tadokoro, Y., Noda, K., Shida, M., Masaaki Fujii.

Language

English

Journal/Book name

Japanese:
English:	Journal of Photopolymer Science and Technology

Volume, Number, Page

Vol. 24 No. 4 pp. 397-400

Published date

2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI