高分解能飛行時間型二次イオン質量分析法を用いた微粒子粒別起源解析法の開発

Publication Information

Title

Japanese:	高分解能飛行時間型二次イオン質量分析法を用いた微粒子粒別起源解析法の開発
English:

Author

Japanese:	間山憲仁, 後藤栄太, 三浦祐哉, 大石乾詞, 坂本哲夫, 高見昭憲, 畠山史郎, 坂東博, 村野健太郎, 藤井正明.
English:	間山憲仁, 後藤栄太, 三浦祐哉, 大石乾詞, 坂本哲夫, 高見昭憲, 畠山史郎, 坂東博, 村野健太郎, Masaaki Fujii.

Language

Japanese

Journal/Book name

Japanese:	Journal of the Vacuum Society of Japan
English:

Volume, Number, Page

Vol. 55 No. 3 pp. 104-107

Published date

2012

Publisher

Japanese:	The Vacuum Society of Japan
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI