Epitaxial ferroelectric Y-doped HfO2 film grown by the RF magnetron sputtering

Publication Information

Title

Japanese:
English:	Epitaxial ferroelectric Y-doped HfO2 film grown by the RF magnetron sputtering

Author

Japanese:	鈴木大生, 清水荘雄, 三村和仙, 内田寛, 舟窪浩.
English:	Taisei Suzuki, Takao Shimizu, Takanori Mimura, Hiroshi Uchida, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 57 pp. 11UF15-1-4

Published date

Oct. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI