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Publication Information
Title
Japanese:
English:
Epitaxial ferroelectric Y-doped HfO2 film grown by the RF magnetron sputtering
Author
Japanese:
鈴木 大生
,
清水 荘雄
,
三村 和仙
,
内田 寛
,
舟窪 浩
.
English:
Taisei Suzuki
,
Takao Shimizu
,
Takanori Mimura
,
Hiroshi Uchida
,
Hiroshi Funakubo
.
Language
English
Journal/Book name
Japanese:
English:
Jpn. J. Appl. Phys.
Volume, Number, Page
Vol. 57 pp. 11UF15-1-4
Published date
Oct. 2018
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.7567/JJAP.57.11UF15
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Tokyo Institute of Technology All rights reserved.