Investigation of InP/Si bonding condition for optimizing Photoluminescence property by Surface Activated Bonding based on Fast Atom Beam

Publication Information

Title

Japanese:
English:	Investigation of InP/Si bonding condition for optimizing Photoluminescence property by Surface Activated Bonding based on Fast Atom Beam

Author

Japanese:	王雨寧, 御手洗拓矢, 雨宮智宏, 西山伸彦, 荒井滋久.
English:	Yuning Wang, Takuya Mitarai, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Compound Semiconductor Week 2019: 31st International Conference on Indium Phosphide and Related Materials (IPRM 2019)

Conference site

Japanese:
English: