Investigation of Photoluminescence property of InP/SOI wafer after bonding experiment using Surface Activated Bonding based on Fast Atom Beam

Publication Information

Title

Japanese:	Investigation of Photoluminescence property of InP/SOI wafer after bonding experiment using Surface Activated Bonding based on Fast Atom Beam
English:	Investigation of Photoluminescence property of InP/SOI wafer after bonding experiment using Surface Activated Bonding based on Fast Atom Beam

Author

Japanese:	王雨寧, MOATAZ Shaher Anis Mahmoud Eissa, 御手洗拓矢, 雨宮智宏, 西山伸彦.
English:	Yuning Wang, Moataz Eissa, Takuya Mitarai, Tomohiro Amemiya, Nobuhiko Nishiyama.

Language

Japanese

Journal/Book name

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Volume, Number, Page

Published date

Sept. 2019

Publisher

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Conference name

Japanese:	第80回応用物理学会秋季学術講演会
English:

Conference site

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English: