Investigation of InP/Si bonding condition for suppressing degradation of Photoluminescence property using Surface Activated Bonding

Publication Information

Title

Japanese:	Investigation of InP/Si bonding condition for suppressing degradation of Photoluminescence property using Surface Activated Bonding
English:	Investigation of InP/Si bonding condition for suppressing degradation of Photoluminescence property using Surface Activated Bonding

Author

Japanese:	王雨寧, 御手洗拓矢, 雨宮智宏, 西山伸彦, 荒井滋久.
English:	Yuning Wang, Takuya Mitarai, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai.

Language

Japanese

Journal/Book name

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English:

Volume, Number, Page

Published date

Mar. 2019

Publisher

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Conference name

Japanese:	第66回応用物理会春季学術講演会
English:

Conference site

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English: