Effects of heat treatment and in situ high temperature XRD study on the formation of ferroelectric epitaxial HfO2 based film

Publication Information

Title

Japanese:
English:	Effects of heat treatment and in situ high temperature XRD study on the formation of ferroelectric epitaxial HfO2 based film

Author

Japanese:	三村和仙, 清水荘雄, 木口賢紀, Akihiro Akama, Toyohiko J. Konno, 勝矢良雄, 坂田修身, 舟窪浩.
English:	Takanori Mimura, Takao Shimizu, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Yoshio Katsuya, Osami Sakata, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 9, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SSDM 2018 (2018 International Conference on Solid State Devices and Materials)

Conference site

Japanese:
English:	Tokyo