Growth of epitaxial Y2O3-doped ferroelectric HfO2 films by sputtering method and their characterization

Publication Information

Title

Japanese:
English:	Growth of epitaxial Y2O3-doped ferroelectric HfO2 films by sputtering method and their characterization

Author

Japanese:	Taisei Suzkuki, 三村和仙, 清水荘雄, 内田寛, 舟窪浩.
English:	Taisei Suzkuki, Takanori Mimura, Takao Shimizu, Hiroshi Uchida, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 9, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SSDM 2018 (2018 International Conference on Solid State Devices and Materials)

Conference site

Japanese:
English:	Tokyo