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Publication Information
Title
Japanese:
スパッタリング法によるHfO2基強誘電体の厚膜化とその電気特性評価
English:
Author
Japanese:
志村礼司郎
,
三村和仙
,
清水荘雄
,
舟窪浩
.
English:
Reijiro Shimura
,
Takanori Mimura
,
Takao Shimizu
,
HIROSHI FUNAKUBO
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 18, 2018
Publisher
Japanese:
English:
Conference name
Japanese:
第79回応用物理学会秋季学術講演会
English:
Conference site
Japanese:
名古屋市
English:
©2007
Institute of Science Tokyo All rights reserved.