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Title
Japanese:スパッタリング法によるHfO2基強誘電体の厚膜化とその電気特性評価 
English: 
Author
Japanese: 志村礼司郎, 三村和仙, 清水荘雄, 舟窪浩.  
English: Reijiro Shimura, Takanori Mimura, Takao Shimizu, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 18, 2018 
Publisher
Japanese: 
English: 
Conference name
Japanese:第79回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese:名古屋市 
English: 

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