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Publication Information
Title
Japanese:
English:
A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology
Author
Japanese:
山根大輔
, Konishi, T., Safu, T., Toshiyoshi, H.,
曽根正人
,
益一哉
,
町田克之
.
English:
Daisuke Yamane
, Konishi, T., Safu, T., Toshiyoshi, H.,
Masato Sone
,
Kazuya Masu
,
Katsuyuki Machida
.
Language
English
Journal/Book name
Japanese:
English:
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
Volume, Number, Page
pp. 419-422
Published date
2016
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.1109/NEMS.2016.7758281
©2007
Institute of Science Tokyo All rights reserved.