Epitaxial PZT fi lms for MEMS printing applications

Publication Information

Title

Japanese:
English:	Epitaxial PZT fi lms for MEMS printing applications

Author

Japanese:	舟窪浩, Dekkers, M., Sambri, A., Gariglio, S., Shklyarevskiy, I., Rijnders, G..
English:	HIROSHI FUNAKUBO, Dekkers, M., Sambri, A., Gariglio, S., Shklyarevskiy, I., Rijnders, G..

Language

English

Journal/Book name

Japanese:
English:	MRS Bulletin

Volume, Number, Page

Vol. 37 No. 11 pp. 1030-1038

Published date

2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI