A time-multiplexed electrostatic drive and sample interface circuit for MEMS optical scanners

Publication Information

Title

Japanese:
English:	A time-multiplexed electrostatic drive and sample interface circuit for MEMS optical scanners

Author

Japanese:	Maruyama, S., Konishi, T., 町田克之, Ishihara, N., 益一哉, Fujita, H., Toshiyoshi, H..
English:	Maruyama, S., Konishi, T., Katsuyuki Machida, Ishihara, N., Kazuya Masu, Fujita, H., Toshiyoshi, H..

Language

English

Journal/Book name

Japanese:
English:	International Conference on Optical MEMS and Nanophotonics

Volume, Number, Page

pp. 21-22

Published date

2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI