一軸加圧熱処理によるエピタキシャルTixOy薄膜の構造･特性制御

Publication Information

Title

Japanese:	一軸加圧熱処理によるエピタキシャルTixOy薄膜の構造･特性制御
English:	Structure and property modification of epitaxial TixOy thin films by post-depositional uniaxial compressive annealing

Author

Japanese:	生田貴大, 堀松芳樹, 金子智, 松田晃史, 吉本護.
English:	Takahiro Ikuta, Yoshiki Horimatsu, Satoru Kaneko, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 4, 2019

Publisher

Japanese:	応用物理学会
English:	The Japan Society of Applied Physics

Conference name

Japanese:	第80回応用物理学会秋季学術講演会
English:	The 80th JSAP Autumn Meeting, 2019

Conference site

Japanese:	札幌
English:	Sapporo

Official URL