室温パルスレーザー照射を用いた種々の基板及びバッファ層上における非晶質Ga2O3薄膜のエピタキシャル結晶化

Publication Information

Title

Japanese:	室温パルスレーザー照射を用いた種々の基板及びバッファ層上における非晶質Ga2O3薄膜のエピタキシャル結晶化
English:	Epitaxial crystallization of Ga2O3 thin films on various substrates and buffer layer by room temperature pulsed laser irradiation

Author

Japanese:	松島拓海, 森田公之, 土嶺信男, 金子智, 松田晃史, 吉本護.
English:	Takumi Matsushima, Hiroyuki Morita, Nobuo Tsuchimine, Satoru Kaneko, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 4, 2019

Publisher

Japanese:	応用物理学会
English:	The Japan Society of Applied Physics

Conference name

Japanese:	第80回応用物理学会秋季学術講演会
English:	The 80th JSAP Autumn Meeting, 2019

Conference site

Japanese:	札幌
English:	Sapporo

Official URL