エキシマ光プロセスを用いた超平坦ポリマー基板上でのZnO薄膜の低温合成と高結晶配向化

Publication Information

Title

Japanese:	エキシマ光プロセスを用いた超平坦ポリマー基板上でのZnO薄膜の低温合成と高結晶配向化
English:	Low-temperature synthesis of highly oriented ZnO thin films on ultra-flat polymer substrates using excimer light processes

Author

Japanese:	大賀友瑛, 大島淳史, 金子奈帆, 金子智, 松田晃史, 吉本護.
English:	Tomoaki Oga, Atsushi Oshima, Naho Kaneko, Satoru Kaneko, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 4, 2019

Publisher

Japanese:	応用物理学会
English:	The Japan Society of Applied Physics

Conference name

Japanese:	第80回応用物理学会秋季学術講演会
English:	The 80th JSAP Autumn Meeting, 2019

Conference site

Japanese:	札幌
English:	Sapporo

Official URL