ポリマーに転写した原子レベルナノパターンの光・熱による形状制御

Publication Information

Title

Japanese:	ポリマーに転写した原子レベルナノパターンの光・熱による形状制御
English:	Morphology control of atomic- and nano-scale periodic patterns transcribed on polymer sheet by thermal annealing and excimer light irradiation

Author

Japanese:	金子奈帆, 大賀友瑛, 大島淳史, 金子智, 松田晃史, 吉本護.
English:	Naho Kaneko, Tomoaki Oga, Atsushi Oshima, Satoru Kaneko, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 4, 2019

Publisher

Japanese:	応用物理学会
English:	The Japan Society of Applied Physics

Conference name

Japanese:	第80回応用物理学会秋季学術講演会
English:	The 80th JSAP Autumn Meeting, 2019

Conference site

Japanese:	札幌
English:	Sapporo

Official URL