EUV光源コレクターミラーの保護膜における劣化メカニズムの解明

Publication Information

Title

Japanese:	EUV光源コレクターミラーの保護膜における劣化メカニズムの解明
English:	Elucidation of deterioration mechanism in protective film of collector mirror for EUV light source

Author

Japanese:	本田能之, 柳田達哉, 白石裕, 森田昌幸, 安藤正彦, 戸室啓明, 松田晃史, 吉本護.
English:	Yoshiyuki Honda, Tatsuya Yanagida, Yutaka Shiraishi, Masayuki Morita, Masahiko Andou, Hiroaki Tomuro, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 4, 2019

Publisher

Japanese:	応用物理学会
English:	The Japan Society of Applied Physics

Conference name

Japanese:	第80回応用物理学会秋季学術講演会
English:	The 80th JSAP Autumn Meeting, 2019

Conference site

Japanese:	札幌
English:	Sapporo

Official URL