Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability

Author

Language

English

Journal/Book name

Japanese:
English:	IEEE Conference Paper

Volume, Number, Page

Published date

Jan. 13, 2020

Publisher

Japanese:
English:	2019 IEEE SENSORS

Conference name

Japanese:
English:	IEEE Sensors 2019

Conference site

Japanese:
English:	Montreal

Official URL

https://ieeexplore.ieee.org/document/8956496

DOI

https://doi.org/10.1109/SENSORS43011.2019.8956496

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