Amorphous IGZO TFT with High Mobility of ~70 cm2/Vs via Vertical Dimension Control using PEALD

Publication Information

Title

Japanese:
English:	Amorphous IGZO TFT with High Mobility of ~70 cm2/Vs via Vertical Dimension Control using PEALD

Author

Japanese:	Jiazhen Sheng, TaeHyun Hong, Hyun-Mo Lee, KyoungRok Kim, 笹瀬雅人, 金正煥, 細野秀雄, Jin-Seong Park.
English:	Jiazhen Sheng, TaeHyun Hong, Hyun-Mo Lee, KyoungRok Kim, Masato Sasase, Junghwan Kim, Hideo Hosono, Jin-Seong Park.

Language

English

Journal/Book name

Japanese:
English:	ACS applied materials & interfaces

Volume, Number, Page

Vol. 11 No. 43 pp. 40300-10309

Published date

Oct. 4, 2019

Publisher

Japanese:
English:	American Chemical Society (ACS)

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI