MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology

Publication Information

Title

Japanese:
English:	MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology

Author

Japanese:	町田克之, 山根大輔, 小西敏文, 飯田慎一, 石原昇, Chang Tso-Fu Mark, 曽根正人, 伊藤浩之, 益一哉.
English:	Katsuyuki Machida, Daisuke Yamane, Toshifumi Konishi, Shin-ichi Iida, Noboru Ishihara, Tso-Fu Mark Chang, Masato Sone, Hiroyuki Ito, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	ECS Transactions

Volume, Number, Page

Vol. 92 pp. 169-184

Published date

July 3, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI