アモルファス炭素膜の熱分解挙動と構造変化の均一性

Publication Information

Title

Japanese:	アモルファス炭素膜の熱分解挙動と構造変化の均一性
English:

Author

Japanese:	赤坂大樹, Sarayut Tunmee, Chanan Euaruksakun, Ukit Rittihong, Ratchadaporn Supruangnet, 平田祐樹, 大竹尚登.
English:	Hiroki Akasaka, Sarayut Tunmee, Chanan Euaruksakun, Ukit Rittihong, Ratchadaporn Supruangnet, Yuki Hirata, NAOTO OHTAKE.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 9, 2019

Publisher

Japanese:
English:

Conference name

Japanese:	2019年第66回応用物理学会春季学術講演会
English:	JSAP Spring Meeting 2019

Conference site

Japanese:	東京
English:	Tokyo