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Publication Information
Title
Japanese:
Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)
English:
Author
Japanese:
市川 崇志
,
乙部 翔太
,
渥美 賢
,
古賀 達也
,
山根 大輔
,
飯田 慎一
,
伊藤 浩之
,
石原 昇
,
町田 克之
,
曽根 正人
,
益 一哉
.
English:
Takasi Itikawa
,
Shouta Otobe
,
Ken Atsumi
,
Sayaka Koga
,
Daisuke Yamane
,
Shinichi Iida
,
Hiroyuki Ito
,
Noboru Ishihara
,
Katsuyuki Machida
,
Masato Sone
,
Kazuya Masu
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 18, 2019
Publisher
Japanese:
English:
Conference name
Japanese:
第80回応用物理学会秋季学術講演会
English:
Conference site
Japanese:
北海道
English:
©2007
Institute of Science Tokyo All rights reserved.