Home >

news Help

Publication Information


Title
Japanese:Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2) 
English: 
Author
Japanese: 市川 崇志, 乙部 翔太, 渥美 賢, 古賀 達也, 山根 大輔, 飯田 慎一, 伊藤 浩之, 石原 昇, 町田 克之, 曽根 正人, 益 一哉.  
English: Takasi Itikawa, Shouta Otobe, Ken Atsumi, Sayaka Koga, Daisuke Yamane, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Katsuyuki Machida, Masato Sone, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 18, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:第80回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese:北海道 
English: 

©2007 Tokyo Institute of Technology All rights reserved.