A micro vertically-allocated SU-8 check valve and its characteristics

Publication Information

Title

Japanese:
English:	A micro vertically-allocated SU-8 check valve and its characteristics

Author

Japanese:	Mao Zebing, 吉田和弘, 金俊完.
English:	Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim.

Language

English

Journal/Book name

Japanese:
English:	Microsystem Technologies

Volume, Number, Page

Volume 25 No. 1 pp. 245-255

Published date

Jan. 2019

Publisher

Japanese:
English:	Springer Nature

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI