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Publication Information
Title
Japanese:
English:
A micro vertically-allocated SU-8 check valve and its characteristics
Author
Japanese:
Mao Zebing
,
吉田 和弘
,
金 俊完
.
English:
Zebing Mao
,
Kazuhiro Yoshida
,
Joon-wan Kim
.
Language
English
Journal/Book name
Japanese:
English:
Microsystem Technologies
Volume, Number, Page
Volume 25 No. 1 pp. 245-255
Published date
Jan. 2019
Publisher
Japanese:
English:
Springer Nature
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.1007/s00542-018-3958-3
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Tokyo Institute of Technology All rights reserved.