Achieving non-degenerate Zn3N2 thin films by near room temperature sputtering deposition

Publication Information

Title

Japanese:
English:	Achieving non-degenerate Zn3N2 thin films by near room temperature sputtering deposition

Author

Japanese:	Y. Wang, T. Ohsawa, 熊谷悠, 原田航, 大場史康, N. Ohashi.
English:	Y. Wang, T. Ohsawa, Y. Kumagai, K. Harada, F. Oba, N. Ohashi.

Language

English

Journal/Book name

Japanese:
English:	Applied Physics Letters

Volume, Number, Page

vol. 115 pp. 092104

Published date

Aug. 27, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI