Deposition of a-C:H Film on Inner Surface of the Tube by Nanopulse Plasma CVD and Analysis of Plasma Behavior

Publication Information

Title

Japanese:	Deposition of a-C:H Film on Inner Surface of the Tube by Nanopulse Plasma CVD and Analysis of Plasma Behavior
English:	Deposition of a-C:H Film on Inner Surface of the Tube by Nanopulse Plasma CVD and Analysis of Plasma Behavior

Author

Japanese:	平田祐樹, 竹波慶大郎, Ryouta Takamura, 岩本喜直, 赤坂大樹, 大竹尚登.
English:	Yuki Hirata, Keitaro Takenami, Ryouta Takamura, Yoshinao Iwamoto, Hiroki Akasaka, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 17, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	3rd International Conference on Applied Surface Science

Conference site

Japanese:
English:	Pisa