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Publication Information
Title
Japanese:
積層メタル技術で作製したMEMS加速度センサの衝撃特性評価
English:
Author
Japanese:
市川 崇志
,
古賀 達也
,
山根 大輔
,
飯田 慎一
,
石原 昇
,
伊藤 浩之
,
Chang Tso-Fu Mark
,
曽根 正人
,
町田 克之
,
益 一哉
.
English:
Takasi Itikawa
,
Sayaka Koga
,
Daisuke Yamane
,
Shinichi Iida
,
Noboru Ishihara
,
Hiroyuki Ito
,
Tso-Fu Mark Chang
,
Masato Sone
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
19pm4-A-4
Published date
Nov. 19, 2019
Publisher
Japanese:
English:
Conference name
Japanese:
第11回集積化MEMSシンポジウム
English:
Conference site
Japanese:
静岡県
English:
©2007
Institute of Science Tokyo All rights reserved.