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Title
Japanese:3Dピラー型Au錘MEMS加速度センサ 
English: 
Author
Japanese: 市川 崇志, 乙部 翔太, 渥美 賢, 古賀 達也, 山根 大輔, 飯田 慎一, 伊藤 浩之, 石原 昇, 曽根 正人, 町田 克之, 益 一哉.  
English: Takasi Itikawa, Shouta Otobe, Ken Atsumi, Sayaka Koga, Daisuke Yamane, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         19am3-PS3-21
Published date Nov. 19, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:第36回「センサ・マイクロマシンと応用システム」シンポジウム 
English: 
Conference site
Japanese:静岡県 
English: 

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