Low environmental loading process: Spin spray for thin film deposition of functional metal oxides

Publication Information

Title

Japanese:
English:	Low environmental loading process: Spin spray for thin film deposition of functional metal oxides

Author

Japanese:	LIN Hwai-en, 久保田雄太, 松下伸広.
English:	Hwai-En Lin, Yuta Kubota, Nobuhiro Matsushita.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MRM2019

Conference site

Japanese:
English:	Yokohama