Diagnostics  of  Electron  Temperature  and  Density  of  Low-pressure Microwave Discharge Ar Plasma by Optical Emission Spectroscopy Based on Collisional Radiative Model

Publication Information

Title

Japanese:
English:	Diagnostics of Electron Temperature and Density of Low-pressure Microwave Discharge Ar Plasma by Optical Emission Spectroscopy Based on Collisional Radiative Model

Author

Japanese:	山崎文徳, 根津篤, 赤塚洋.
English:	Fuminori Yamazaki, Atsushi Nezu, Hiroshi Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Abstracts of APSPT11

Volume, Number, Page

Published date

Dec. 11, 2019

Publisher

Japanese:
English:	Program Committee of APSPT11

Conference name

Japanese:
English:	The 11th Asia Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT11)

Conference site

Japanese:	金沢
English:	Kanazawa

Official URL