Plasma exposure behavior of yttrium oxyfluoride ceramics

Publication Information

Title

Japanese:
English:	Plasma exposure behavior of yttrium oxyfluoride ceramics

Author

Japanese:	宮下健司, 津之浦徹, 吉田克己, 矢野豊彦.
English:	Kenji Miyashita, Toru Tsunoura, Katsumi Yoshida, Toyohiko Yano.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

P-21

Published date

Nov. 15, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 40th International Symposium on Dry Process (DPS2018)

Conference site

Japanese:
English:	Nagoya