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Publication Information
Title
Japanese:
English:
High Hall-Effect Mobility of Large-Area Atomic-Layered Polycrystalline ZrS2 Film using UHV RF Magnetron Sputtering and Sulfurization
Author
Japanese:
濱田 昌也
, Kentaro Matsuura,
坂本 拓朗
,
宗田 伊理也
,
星井 拓也
,
角嶋 邦之
,
筒井 一生
,
若林 整
.
English:
Masaya Hamada
, Kentaro Matsuura,
Takuro Sakamoto
,
Iriya Muneta
,
Takuya Hoshii
,
Kuniyuki Kakushima
,
Kazuo Tsutsui
,
Hitoshi Wakabayashi
.
Language
English
Journal/Book name
Japanese:
English:
Journal of the Electron Devices Society (J-EDS)
Volume, Number, Page
Vol. 7 No. 1 pp. 1258-1263
Published date
Dec. 2019
Publisher
Japanese:
English:
IEEE
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.1109/JEDS.2019.2943609
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Tokyo Institute of Technology All rights reserved.