Interface State Density of Atomic Layer Deposited Al2O3 on Beta-Ga2O3

Publication Information

Title

Japanese:
English:	Interface State Density of Atomic Layer Deposited Al2O3 on Beta-Ga2O3

Author

Japanese:	C. Y. Su, 星井拓也, 宗田伊理也, 若林整, 筒井一生, 岩井洋, 角嶋邦之.
English:	C. Y. Su, T. Hoshii, I. Muneta, H. Wakabayashi, K. Tsutsui, H. Iwai, K. Kakushima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ECS Meeting

Conference site

Japanese:
English: