Pulse deposition of Y2O3 films by Y(iPrCp)3 assisted by Ar boost technology

Publication Information

Title

Japanese:
English:	Pulse deposition of Y2O3 films by Y(iPrCp)3 assisted by Ar boost technology

Author

Japanese:	Y. W. Lin, J. Song, 星井拓也, 若林整, 筒井一生, 角嶋邦之.
English:	Y. W. Lin, J. Song, T. Hoshii, H. Wakabayashi, K. Tsutsui, K. Kakushima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Int. Workshop on Dielectric Thin Films for Future Electron Devices -Science and Technology- (IWDTF2019)

Conference site

Japanese:
English:	Tokyo