Analyses of 3D Atomic Arrangements of Dopants in Si Crystal Using Spectro-photoelectron Holography

Publication Information

Title

Japanese:
English:	Analyses of 3D Atomic Arrangements of Dopants in Si Crystal Using Spectro-photoelectron Holography

Author

Japanese:	筒井一生, 名取鼓太郎, 小川達博, 室隆桂之, T. Matsuishita, Y. Morikawa, 星井拓也, 角嶋邦之, 若林整, K. Hayashi, F. Matsui, 木下豊彦.
English:	K. Tsutsui, K. Natori, T. Ogawa, T. Muro, T. Matsuishita, Y. Morikawa, T. Hoshii, K. Kakushima, H. Wakabayashi, K. Hayashi, F. Matsui, T. Kinoshita.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Material Resarch Meeing 2019 (MRM2019)

Conference site

Japanese:
English:	Yokohama