A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing

Publication Information

Title

Japanese:
English:	A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing

Author

Japanese:	古賀達也, 市川崇志, 山根大輔, 飯田慎一, 石原昇, 伊藤浩之, 町田克之, 益一哉.
English:	Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Noboru Ishihara, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 23, 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020)

Conference site

Japanese:
English:	Hiroshima