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Title
Japanese:発光分光計測（OES）を用いたプラズマパラメータの診断 
English:Diagnostics of Plasma Parameters of Optical Emission Spectroscopy (OES) Measurement 
Author
Japanese: 赤塚洋.  
English: Hiroshi AKATSUKA.  
Language Japanese 
Journal/Book name
Japanese:シリコンテクノロジー 
English: 
Volume, Number, Page     No. 223    pp. 23-28
Published date Feb. 14, 2020 
Publisher
Japanese:応用物理学会シリコンテクノロジー分科会 
English: 
Conference name
Japanese:応用物理学会シリコンテクノロジー分科会第223回 研究集会「プラズマプロセスにおけるナノ加工精度とダメージ制御」 
English: 
Conference site
Japanese:東京 
English:Tokyo 
Official URL https://annex.jsap.or.jp/silicon/activity/studyGroup/223
 
Abstract A method is introduced to examine plasma parameters, such as electron temperature (Te) and electron density (Ne), by optical emission spectroscopy (OES) measurement. Collisional radiative (CR) model is explained to interpret the OES data emitted from plasmas in a state of non-equilibrium, followed by a concrete example to deduce Te and Ne of argon plasmas with the OES data.

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