スパッタMoS2膜の HfO2膜越し硫化における表面残留硫黄除去

Publication Information

Title

Japanese:	スパッタMoS2膜の HfO2膜越し硫化における表面残留硫黄除去
English:

Author

Japanese:	谷川晴紀, 松浦賢太朗, 濱田昌也, 坂本拓朗, 宗田伊理也, 星井拓也, 角嶋邦之, 筒井一生, 若林整.
English:	Haruki Tanigawa, Kenntarou Matsuura, Masaya Hamada, Takuro Sakamoto, Iriya Muneta, Takuya Hoshii, Kuniyuki KAKUSHIMA, KAZUO TSUTSUI, Hitoshi Wakabayashi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 18, 2018

Publisher

Japanese:
English:

Conference name

Japanese:	第79回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	名古屋
English: