InP/SiO2/Si Surface Activated Bonding assisted by Si nano-film

Publication Information

Title

Japanese:
English:	InP/SiO2/Si Surface Activated Bonding assisted by Si nano-film

Author

Japanese:	方偉成, 王雨寧, 雨宮智宏, 西山伸彦.
English:	weicheng Fang, Yuning Wang, Tomohiro Amemiya, Nobuhiko Nishiyama.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 26, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	9th International Symposium on Photonics and Electronics Convergence

Conference site

Japanese:
English:	Tokyo