Evaluation of Metal/Polymer Adhesion and Highly Reliable Four-Point Bending Test Using Stealth Dicing Method in 3D Integration

Publication Information

Title

Japanese:
English:	Evaluation of Metal/Polymer Adhesion and Highly Reliable Four-Point Bending Test Using Stealth Dicing Method in 3D Integration

Author

Japanese:	YangYi-Lun, 伊藤浩之, YOUNGSUKKIM, 大場隆之, CHENKUAN-NENG.
English:	Yi-Lun Yang, Hiroyuki Ito, Kim Youngsuk, Takayuki Ohba, Kuan-Neng Chen.

Language

English

Journal/Book name

Japanese:
English:	IEEE Transactions on Components, Packaging and Manufacturing Technology

Volume, Number, Page

Published date

Jan. 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: