Crystal Structure Change with Applying an Electric Filed in Pb(Zr, Ti)O3 Films for MEMS Applications

Publication Information

Title

Japanese:
English:	Crystal Structure Change with Applying an Electric Filed in Pb(Zr, Ti)O3 Films for MEMS Applications

Author

Japanese:	舟窪浩, Naoya Ohshima, 井上英久, 江原祥隆, 清水荘雄, 内田寛.
English:	Hiroshi Funakubo, Naoya Ohshima, Hidehisa Inoue, Yoshitaka Ehara, Takao Shimizu, Hiroshi Uchida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

July 14, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	F2cπ2 2019 (Joint ISAF-ICE-EMF-IWPM-PFM meeting 2019)

Conference site

Japanese:
English:	Lausanne