STEM-EELS法によるHfO2薄膜の結晶相・配向性の評価

Publication Information

Title

Japanese:	STEM-EELS法によるHfO2薄膜の結晶相・配向性の評価
English:

Author

Japanese:	木口賢紀, 白石貴久, 三村和仙, 清水荘雄, 舟窪浩, 今野豊彦.
English:	Takanori Kiguchi, Takahisa Shiraishi, Takanori Mimura, Takao Shimizu, HIROSHI FUNAKUBO, Toyohiko Konno.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 17, 2019

Publisher

Japanese:
English:

Conference name

Japanese:	日本顕微鏡学会第75回学術講演会
English:

Conference site

Japanese:	名古屋市
English: