Thickness-dependent crystal structure of epitaxial ferroelectric 0.07YO1.5-0.93HfO2 and HZO films

Publication Information

Title

Japanese:
English:	Thickness-dependent crystal structure of epitaxial ferroelectric 0.07YO1.5-0.93HfO2 and HZO films

Author

Japanese:	三村和仙, 清水荘雄, 舟窪浩.
English:	Takanori Mimura, Takao Shimizu, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 11, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ISIF 2019 (7th International Symposium on Intagrated Functionalities)

Conference site

Japanese:
English:	Dublin