Stability of Ferroelectric Orthorhombic Phase in Epitaxial HfO2-based Films

Publication Information

Title

Japanese:
English:	Stability of Ferroelectric Orthorhombic Phase in Epitaxial HfO2-based Films

Author

Japanese:	三村和仙, 清水荘雄, 勝矢良雄, 坂田修身, 舟窪浩.
English:	Takanori Mimura, Takao Shimizu, Yoshio Katsuya, Osami Sakata, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 3, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	19th US-Japan Seminar on Dielectric and Piezoelectric Ceramics

Conference site

Japanese:
English:	Tsukuba