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Title
Japanese:スパッタリング法によるHfO2基強誘電体厚膜の室温製膜とその電気特性評価 
English: 
Author
Japanese: 志村礼司郎, 三村和仙, 舘山明紀, 清水荘雄, 舟窪浩.  
English: Reijiro Shimura, Takanori Mimura, Akinori Tateyama, Takao Shimizu, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 12, 2020 
Publisher
Japanese: 
English: 
Conference name
Japanese:第67回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:東京都 
English: 

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