Three-Dimensional Integration Technologies -Overview and Future Prospects | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:	３次元集積化技術の現状と将来展望
English:	Three-Dimensional Integration Technologies -Overview and Future Prospects

Author

Japanese:	大場隆之, 中村友二.
English:	Takayuki Ohba, Tomoji Nakamura.

Language

Japanese

Journal/Book name

Japanese:	応用物理
English:

Volume, Number, Page

Vol. 89 No. 2 pp. 75

Published date

Feb. 10, 2020

Publisher

Japanese:	応用物理学会
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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