High-quality InP/SOI heterogeneous material integration by room temperature surface-activated bonding for hybrid photonic devices

Publication Information

Title

Japanese:
English:	High-quality InP/SOI heterogeneous material integration by room temperature surface-activated bonding for hybrid photonic devices

Author

Japanese:	王雨寧, 永坂久美, 御手洗拓矢, 大礒義孝, 雨宮智宏, 西山伸彦.
English:	Yuning Wang, Kumi Nagasaka, Takuya Mitarai, Yoshitaka Oiso, Tomohiro Amemiya, Nobuhiko Nishiyama.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 59 No. 5 p. 052004

Published date

Apr. 23, 2020

Publisher

Japanese:
English:	Japanese Applied Physics Society

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI