N極性GaN HEMT作製プロセスにおけるプラズマダメージの低減

Publication Information

Title

Japanese:	N極性GaN HEMT作製プロセスにおけるプラズマダメージの低減
English:

Author

Japanese:	早坂明泰, 青沼遼介, 堀田航史, 金井七重, 眞壁勇夫, 吉田成輝, 宮本恭幸.
English:	Akihiro Hayasaka, Ryousuke Aonuma, Koushi Hotta, Nanae Kanai, 眞壁勇夫, 吉田成輝, YASUYUKI MIYAMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

18p-N302-11

Published date

Sept. 18, 2019

Publisher

Japanese:
English:

Conference name

Japanese:	第80回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	札幌
English: